Large-aperture interferometer workstation

The Verifire XL high-precision Fizeau interferometer allows for the simple and accurate metrology of flat surfaces up to 12" (300mm) in diameter. Designed for measuring large plano surfaces, such as mirrors, semiconductor wafers, or optical windows, the Verifire XL is a turnkey solution incorporating staging, accessories, and production-oriented technology.

The downward-looking orientation of the system, with a heavy-duty tip/tilt part stage, enables repeatable part placement without the need for custom fixturing. The instrument features an integrated reference optic, with full area calibration, enabling metrology to better than 30nm peak-to-valley (PV) across the full 300mm aperture. The compact footprint requires minimal production floor space.

The system comes with a built-in vibration isolation platform and QPSI acquisition technology, enabling reliable, high-precision measurements in the presence of vibration. QPSI delivers true on-axis surface form metrology, without degradation from typical production vibrations. The high-performance transmission flat in the Verifire XL system is designed for minimal sensitivity to gravitational sag, and includes a full-area calibration file to enable optimum system accuracy.

Measurement and analysis of surface topography on the interferometer is handled by Zygo Mx software. In addition to QPSI acquisition, Mx software offers a range of operational features and data measurement visualization tools in an easy-to-use interface. It also includes Smart Averaging, which automatically provides the best possible measurement in the shortest time, improving capability for production situations.

The system shares the Verifire line of phase-shifting laser Fizeau interferometers delivering a robust and stable design, a long-life high-powered laser source, and a high-speed, high-resolution camera for data and instrument reliability in demanding applications.

Download the spec sheet at http://goo.gl/ceXfzS

Learn more about interferometry with technical papers from Zygo Corp. at http://goo.gl/Pa95gL

Zygo Corp., a division of AMETEK Inc.
www.zygo.com
www.ametek.com