Small steering stages

Small steering stages

October 2, 2017

Physik Instrumente (PI) GmbH & Co. KG
Design Components Motion Control

Auburn, Massachusetts – PI (Physik Instrumente) broadens its portfolio of piezo steering mirrors with the S-335 fast steering mirror (FSM) platform. With milli-second response and settling time and high dynamic linearity, the S-335 FSM platforms are for precision image processing and image stabilization, laser beam steering, materials processing, and lithography.

2-axis, frictionless guiding
S-335 steering mirror platforms provide precise angular tip/tilt motion of the top platform around two orthogonal axes. These flexure-guided, electro-ceramic driven systems can provide higher accelerations than other actuators, enabling step response times in the sub-millisecond range, with frictionless backlash-free motion. The single pivot-point design also prevents the drawback of polarization rotation, which is common with conventional 2-axis stacked systems, e.g. galvo scanners.

Long ranges, integrated motion amplifier
Integrated EDM flexure based motion amplifiers provide an industry-leading tip/tilt angle up to 35mrad, equal to an optical deflection angle of 70mrad (4°). ID chip support allows for fast start-up and a simple data exchange between tip/tilt platforms and controllers.

PI piezo steering mirrors are based on a parallel-kinematics design with coplanar rotational axes and a single moving platform driven by two pairs of differential actuators. The advantage is jitter-free, multi-axis motion with excellent temperature stability. Compared to stacked (two-stage) mirror scanners, the parallel-kinematics design provides symmetrical dynamic performance in both axes with faster response and better linearity in a smaller package.